Borrador del Comité
ISO/CD 13084
Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
Reference number
ISO/CD 13084
ISO/CD 13084
Edition 3
© ISO 2024
Borrador del Comité
Resumen
This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.
Informaciones generales
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Estado: En desarrolloEtapa: CD aprobado para su registro como DIS [30.99]
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Edición: 3
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Comité Técnico :ISO/TC 201/SC 6
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Ciclo de vida
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Anteriormente
PublicadoISO 13084:2018
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Ahora
