Abstract
This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.
General information
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Status: Under developmentStage: DIS registered [40.00]
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Edition: 1
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Technical Committee :ISO/TC 107ICS :17.020
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