Draft
International Standard
ISO/DIS 23131-3
Ellipsometry — Part 3: Transparent single layer model
Reference number
ISO/DIS 23131-3
Edition 1
Draft International Standard
ISO/DIS 23131-3
83903
This Draft International Standard is in the enquiry phase with ISO members.

Abstract

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

General information

  •  : Under development
    : DIS registered [40.00]
  •  : 1
  • ISO/TC 107
    17.020 
  • RSS updates

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