ISO/TS 22933:2022 - Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS

Abstract

This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

General information

Status
: Published

Publication date
: 2022-04
Edition
: 1

Number of pages
: 15
Technical Committee
: ISO/TC 201/SC 6 Secondary ion mass spectrometry
ICS
:
71.040.40 Chemical analysis

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ISO/TS 22933:2022
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