International Standard
ISO 22278:2020
Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
Reference number
ISO 22278:2020
Edition 1
2020-08
© ISO 2024
International Standard
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Published (Edition 1, 2020)

ISO 22278:2020

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CHF 151
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Abstract

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

General information

  • Status
     : Published
    Publication date
     : 2020-08
    Stage
    : International Standard published [60.60]
  • Edition
     : 1
    Number of pages
     : 29
  • Technical Committee :
    ISO/TC 206
    ICS :
    81.060.30 
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goal

9
Industry, Innovation and Infrastructure

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