ISO 20146:2019
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ISO 20146:2019
67152

Abstract  Preview

This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.

This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.


General information 

  •  :  Published
     : 2019-01
  •  : 1
     : 16
  •  : ISO/TC 112 Vacuum technology
  •  :
    23.160 Vacuum technology

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