This standard was last reviewed and confirmed in 2018. Therefore this version remains current.
ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
Status: PublishedPublication date: 2013-08
Edition: 1Number of pages: 41
Technical Committee: ISO/TC 213 Dimensional and geometrical product specifications and verification
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