ISO 11938:2012

Published (Edition 1, 2012)

This standard was last reviewed and confirmed in 2022. Therefore this version remains current.

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Abstract

This International Standard provides procedures for electron microprobe elemental-mapping analysis using

wavelength-dispersive spectrometry. The choice between mapping with the electron beam moving digitally

across the specimen (electron beam mapping) and mapping with stage movement only (large-area mapping) is

assessed. It describes five types of data processing: the raw X‑ray intensity data method, the k‑value method,

the calibration method, the correlation method and the matrix correction method.

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