Reference number
ISO 5302:2003
ISO 5302:2003
Vacuum technology — Turbomolecular pumps — Measurement of performance characteristics
Edition 1
2003-07
Withdrawn
ISO 5302:2003
11311
Withdrawn (Edition 1, 2003)

Abstract

ISO 5302:2003 specifies methods for the measurements of performance characteristics of turbomolecular pumps. It is applicable to all sizes and all types of turbomolecular pumps, with mechanical or magnetic bearings, and with or without an additional drag stage.

General information

  •  : Withdrawn
     : 2003-07
    : Withdrawal of International Standard [95.99]
  •  : 1
     : 14
  • ISO/TC 112
    23.160 
  • RSS updates

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