Reference number
IEC/TR 63258:2021
Technical Report
IEC/TR 63258:2021
Nanotechnologies — A guideline for ellipsometry application to evaluate the thickness of nanoscale films
Edition 1
2021-03
Technical Report
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IEC/TR 63258:2021
75422
Published (Edition 1, 2021)

IEC/TR 63258:2021

IEC/TR 63258:2021
75422
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CHF 40
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Abstract

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

General information

  •  : Published
     : 2021-03
    : International Standard published [60.60]
  •  : 1
     : 16
  • ISO/TC 229
    07.120 
  • RSS updates

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