Reference number
ISO 18114:2021
International Standard
ISO 18114:2021
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials
Edition 2
2021-05
Preview
ISO 18114:2021
80189
No disponible en español
Publicado (Edición 2, 2021)

ISO 18114:2021

ISO 18114:2021
80189
Idioma
Formato
CHF 42
Convertir Franco suizo (CHF) a tu moneda

Resumen

This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.

The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

Informaciones generales

  •  : Publicado
     : 2021-05
    : Norma Internacional publicada [60.60]
  •  : 2
     : 4
  • ISO/TC 201/SC 6
    71.040.40 
  • RSS actualizaciones

¿Tiene alguna duda?

Consulte nuestras Ayuda y asistencia