Standardization of the design of data bases, for the transfer of data between instruments, and for specifying the properties of algorithms used for surface chemical analysis.

Quick links


Published ISO standards *


ISO standard under development *

Participating members
Observing members

* number includes updates

Reference Title Type
ISO/TC 201/SC 3/SG 1   Atomic Force Microscopy data format for hybrid metrology Working group
ISO/TC 201/SC 3/SG 2   Open source XPS Data and Discussion platforms Working group
ISO/TC 201/SC 3/SG 4   Information and data transfer format Working group
ISO/TC 201/SC 3/SG 5   Knowledge Engineering for Surface Chemical Analysis Working group


Liaison Committees from ISO/TC 201/SC 3

ISO/TC 201/SC 3 can access the documents of the committees below:

Reference Title ISO/IEC
ISO/TC 69/SC 6 Measurement methods and results ISO


Organizations in liaison (Category A and B)
Acronym Title Category
IUPAC International Union of Pure and Applied Chemistry A
IUVSTA International Union for Vacuum Science, Technique and Applications A
VAMAS Versailles Project on Advanced Materials and Standards A

ISO/TC 201/SC 3 - Secretariat

BSI [United Kingdom]

Bldg. C1.5
Reading RG7 4PR Berkshire.
United Kingdom