ISO 14606:2022
p
ISO 14606:2022
83238

Abstract

 Preview

This document gives guidance and requirements on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials, in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.

This document is not intended to cover the use of special multilayered systems such as delta doped layers.


General information 

  •  :  Published
     : 2022-11
  •  : 3
     : 17
  •  : ISO/TC 201/SC 4 Depth profiling
  •  :
    71.040.40 Chemical analysis

Buy this standard

en
Format Language
std 1 88 PDF + ePub
std 2 88 Paper
  • CHF88

Got a question?

Check out our FAQs

Customer care
+41 22 749 08 88

Opening hours:
Monday to Friday - 09:00-12:00, 14:00-17:00 (UTC+1)

Keep up to date with ISO

Sign up to our newsletter for the latest news, views and product information.