Reference number
ISO 23216:2021
International Standard
ISO 23216:2021
Carbon based films — Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
Edition 1
2021-05
Preview
ISO 23216:2021
74875
недоступно на русском языке
Опубликовано (Версия 1, 2021)

ISO 23216:2021

ISO 23216:2021
74875
Язык
Формат
CHF 63
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Тезис

This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.

It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.

It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.

Общая информация

  •  : Опубликовано
     : 2021-05
    : Опубликование международного стандарта [60.60]
  •  : 1
  • ISO/TC 107
    25.220.99 
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