Reference number
ISO/TS 21383:2021
Technical Specification
ISO/TS 21383:2021
Microbeam analysis — Scanning electron microscopy — Qualification of the scanning electron microscope for quantitative measurements
Edition 1
2021-03
Technical Specification
Preview
ISO/TS 21383:2021
70832
No disponible en español
Publicado (Edición 1, 2021)

ISO/TS 21383:2021

ISO/TS 21383:2021
70832
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Formato
CHF 194
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Resumen

This document describes methods to qualify the scanning electron microscope with the digital imaging system for quantitative and qualitative SEM measurements by evaluating essential scanning electron microscope performance parameters to maintain the performance after installation of the instruments. The items and evaluating methods of the performance parameters are selected by users for their own purposes.

Informaciones generales

  •  : Publicado
     : 2021-03
    : Cierre de la revisión [90.60]
  •  : 1
     : 59
  • ISO/TC 202/SC 4
    37.020 
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